The applications of alumina ceramic plates with multiple holes are extremely diverse, almost entirely determined by their hole diameter and performance:
1. As distributors and diffusers
Applications: Used as gas distribution showerheads in
semiconductor manufacturing (CVD, PVD, etching equipment) and photovoltaic (LPCVD) equipment.
Function: Uniformly and smoothly injects reactant gases (such as silane and hydrogen nitride) into the reaction chamber through countless micropores, forming a uniform plasma. This is a key component for forming uniform thin films (such as SiO₂ and Si₃N₄). The pores must be extremely precise and highly clean.
2. As a Filter and Separator Plate
Applications:
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Molten Metal Filtration: In the foundry industry, it is used to filter inclusions and slag from molten aluminum, copper, and cast iron, significantly improving casting quality.
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Chemical Filtration: Used to filter corrosive chemicals and catalysts.
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High-Temperature Flue Gas Dust Removal: Serves as a core filter component, capturing dust particles.
Function: Utilizes different pore sizes to block particles of specific sizes and purify the medium.
3. As a Fixing and Support Plate
Applications:
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Catalyst Carrier: Coating catalysts onto ceramic plates with multiple pores for automotive exhaust purification or industrial chemical reactors. The large surface area provides abundant reaction sites.
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Sintering Setter: Used to support products in sintering furnaces for electronic ceramics and lithium battery materials. Holes facilitate the circulation of hot air, ensuring more even heating.
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Vacuum chucks: In semiconductor and flat panel display manufacturing, vacuum pressure is used to secure silicon wafers and glass substrates through micropores, ensuring a flat and flawless surface.
4. As a flame-retardant and breathable plate
Applications: Used in battery safety valves and electrical equipment housings.
Function: Allows internal gas to slowly escape when pressure rises, preventing explosions, while also blocking external flames from entering, providing explosion-proof and flame-retardant properties.
5. As an acoustic and heat sink
Applications: Used in speaker diaphragms for high-end audio equipment and mufflers for industrial equipment.
Function: Its porous structure aids in the conduction or attenuation of sound waves. Furthermore, the multiple holes in the structure facilitate heat dissipation.